Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : L14
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Host: The Japan Society for Precision Engineering

Surface Quality of Single Crystal Silicon Cut by Wire Electric-Discharge Machining
*Hideo Takino, Kazushi Nomura, Toshimitu Ichinohe, Katsunori Tanimoto, Shuichi Yamaguchi, Masanori Kunieda
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Keywords: WEDM, Optics, Surface, Silicon, Surface roughness, Cutting
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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