Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : L34
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Host: The Japan Society for Precision Engineering

Profile Modification for a Large-sized Wafer in Polishing (2nd Report) : Influence of Polisher Profiles
*Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida
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Keywords: polishing, oscillation control, wafer flatness, polisher profile
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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