Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : M02
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Host: The Japan Society for Precision Engineering

Estimation of Uncertainty in Feature Based Metrology(4th Report) -Measurement of Plane Feature-
Kiyoshi Takamasu, *Kenichirou Nosaka, Ryoshu Furutani, Shigeo Ozono
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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