Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : M53
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Host: The Japan Society for Precision Engineering

Flatness measurements for silicon mirror using near-infrared interferometry
Junichi Utikosi, Shoichi Simada, *Taichiro Okamoto
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Keywords: near-infrared semiconductor laser, Fizeau interferometry, flatness measurements, phase-shift method, silicon mirror
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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