Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : N32
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Host: The Japan Society for Precision Engineering

Precision Measurements of Thin Film Thickness Using Nanometrological AFM
*Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa, Toshiyuki Fujimoto, Isao Kojima, Toshihisa Sakurai, Tadahiro Ohmi, Kiyoshi Takamasu
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Keywords: precision measurement, thickness, uncertainty, AFM, calibration, laser interferometer
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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