Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : N52
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Host: The Japan Society for Precision Engineering

A Vibro Touch Probe Sensor using PZT Thin Film (No. 10) -Surface Profile Measurement Images and the Contact Condition-
*Takefumi Kande, Minoru Kurosawa, Toshiro Higuchi
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Keywords: Probe Sensor, PZT Thin Film, Hydrothermal Method, Surface Profile Measurement
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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