Proceedings of JSPE Semestrial Meeting
2003 JSPE Autumn Meeting
Session ID : E74
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Host: The Japan Society of Precision Engineering

Effects of Tool Shape on Crack Generation in Ultra-Precision Machining of Single-Crystal Silicon
*Masayoshi Nakamura, Tetsuya Hisanaga, Tsunetaka Sumomogi
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Keywords: brittle material, single-crystal silicon, ductile mode machining, ultra precision machining, crack, crystallographic direction
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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