Proceedings of JSPE Semestrial Meeting
2003 JSPE Autumn Meeting
Session ID : F53
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Host: The Japan Society of Precision Engineering

High removal rate ultra-smoothness polishing of aluminum magnetic disk substrate -Influence of polishing fluid supply method on polisher wear-
[in Japanese], *[in Japanese], [in Japanese]
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Keywords: Magnetic disk substrate, Polishing, Polisher life, High removal rate, Polishing fluid supply method, Polishing temperature
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Abstract
[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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