Proceedings of JSPE Semestrial Meeting
2003 JSPE Autumn Meeting
Session ID : H67
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Host: The Japan Society of Precision Engineering

Studey on Defect Detection in Thin Film Layer of SOI Wafer by Using Infrared Evanescent Light (1st Report) - FDTD Analysis of Infrared Evanescent Field on SOI Layer -
*Ryusuke Nakajima, Takashi Miyoshi, Yasuhiro Takaya
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Keywords: evanescent light, SOI Wafer, FDTD method, defect detection
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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