Proceedings of JSPE Semestrial Meeting
2003 JSPE Autumn Meeting
Session ID : N32
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Host: The Japan Society of Precision Engineering

Research on 3DOF ultrasonic motor orienting stage
*So Ogiwara, Shigeki Toyama, Eko Purwanto
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Keywords: Stator, Rotor, Ultasonic motor, orienting stage, 3DOF
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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