Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : C08
Conference information

Host: The Japan Society of Precision Engineering

Micro Hot Embossing of PEEK Material for optical Device
[in Japanese], *[in Japanese], Xue-Chuan Shan
Author information
Keywords: MEMS, PEEK, Lithography, Electroforming, Embossing, Optical Device
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (73K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2003 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top