Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : C33
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Host: The Japan Society of Precision Engineering

Textures Produced with a Vacuum Pin Chuck (1st Report): Forming Method and Dimple Shape
*Atsunobu Une, Kenichiro Yoshitomi, Masaaki Mochida
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Keywords: Vacuum Pin Chuck, Silicon Wafer, Chucking Deformation, Texture, Functional Surface, Dimple
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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