Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : E50
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Host: The Japan Society of Precision Engineering

Electrostatic Linear Drive Operation of an Electrostatic-Levitated Object in High Vacuum
Niino Toshiki, *Tsukamoto Hidetaka, Asama Hazime
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Keywords: Electrostatic Levitation, Electrostatic Motor, Vacuum
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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