Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : F50
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Host: The Japan Society of Precision Engineering

Study on Mirror Surface Grinding Mechanism of GaAs
*Takahiro Koike, Noboru Morita, Masaki Hiyama, Takashi Nishiguchi
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Keywords: Gallium Arsenic, Grinding, Crack, Crystal Azimuth
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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