Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : F81
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Host: The Japan Society of Precision Engineering

Effect of Viscoelastic Behavior of Polishing Pads on Edge Profile of Silicon Wafers
*kumiko sanda, masatoshi ikeda, katsuyoshi kojima, takayuki masunaga
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Keywords: Viscoelastic, Polishing Pads
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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