Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : G04
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Host: The Japan Society of Precision Engineering

Ultra Precision ELID Grinding of ZERODUR Mirror
*Toru Suzuki, hotoshi Ohmori, yoshihiro Uehara, Weimin Lin, Tomoyuki Shimizu
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Keywords: ELID Grinding, Aspherical, Zerodur, On Machine Mesurment
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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