Micro V-grooves Fabrication of Large Germanium Immersion Grating Element for Mid-infrared Spectrograph by using of ″N-aou-VEL″ System 1st Precision Micro-sharpening for Large Grinding Wheel
Published: March 26, 2003Received: November 26, 2002Available on J-STAGE: March 01, 2005Accepted: December 15, 2002
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