Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : G69
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Host: The Japan Society of Precision Engineering

Cutting of Single Crystal Silicon Mirrors by Wire Electric-Discharge Machining
*Hideo Takino, Kazushi Nomura, Toshimitu Ichinohe, Katsunori Tanimoto, Shuichi Yamaguchi, Masanori Kunieda
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Keywords: WEDM, Mirror, Surface Roughness, Silicon, EUV, Optics
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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