Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : A68
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Host: The Japan Society of Precision Engineering

Self-Organization based Facility Planning in Semiconductor Manufacturing
*Yuki Yoshimura, Nobutada Fujii, Motohiro Kobayashi, Toshiyuki Makita, Ituo Hatono, Kanji Ueda
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Keywords: Self-Organization, Semiconductor Manufacturing, Layout Planning
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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