Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : I20
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Host: The Japan Society of Precision Engineering

Ultraprecision Micro Machining of Structures with High Aspect Ratio
*Takaaki Suzumura, Yoshimi Takeuchi, Tomohiko Kawai, Kiyoshi Sawada
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Keywords: Ultraprecision Machining, Diamond Tool, Micro Needle Array, Electroforming
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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