Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : I26
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Host: The Japan Society of Precision Engineering

Micromachining of Brittle Materials with Multi-Directional Vibration Lapping
*Yuki Sato, Nobuyuki Moronuki, Arata Kaneko
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Keywords: Micromachining, Lapping, Brittle Material, Vibration lapping
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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