Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : K15
Conference information

Host: The Japan Society of Precision Engineering

Probing Technique for Micromachine Elements Using Optically Trapped Particle -Probe Particle Trapped by Wiggling Tweezer-
*[in Japanese], [in Japanese], [in Japanese], [in Japanese]
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Keywords: Nano-CMM, Optical Trap, Position Sensing Probe
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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