Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : B07
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Host: The Japan Society of Precision Engineering

New Manufacturing Process with Electronic Field Intelligent Compounds
*Noritsugu Umehara, Tomoji Nakamura, Youichi Akagami
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Keywords: Micro Fabrication, Polishing, Electronic Field
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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