Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : M66
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Host: The Japan Society of Precision Engineering

Development of Electrostatic Levitation Motor for Vacuum Environment - 1st Report
Akio Yamamoto, Hidehiko Yasui, *Naoshige Shimizu, Toshiro Higuchi
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Keywords: Electrostatic Motor, Levitation Motor, Non-Contact Driving, Electrostatic Levitation, Vacuum, Electron Beam
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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