Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : N32
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The Study on the Effect of Environmental Temperature Change on the Accuracy of Ultra-Precision Displacement Sensors
*Bo FengJiro Otsuka
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
The practical resolution and the accuracy of the measurements of ultra-precision displacement sensors vary with the environmental conditions such as noise, temperature, wind, air pressure and even the humidity. Here we made some experiments on the effect of the environmental temperature giving the accuracy of ultra-precision displacement sensors. In order to find what causes these phenomena, we selected some kinds of displacement sensors and use the green room to make our experiments. After the analysis of the data, it is known that the temperature gives the effect on the measure system especially on the displacement sensors. And it is clear that the changes of different sensors caused by the temperature are very different.
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© 2003 The Japan Society for Precision Engineering
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