Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : N38
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Host: The Japan Society of Precision Engineering

Development of Position Sensor that Utilizes Driving Electrodes of Electrostatic Motor
Akio Yamamoto, Takashi Nishijima, Hidehiko Yasui, *Kouta Nagaoka, Toshiro Higuchi
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Keywords: Electrostatic Motor, Position Sensor, Linear Scale, Positioning Control
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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