Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : N52
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Host: The Japan Society of Precision Engineering

Non-Contact Rotational Mechanism Via Squeeze Gas Film Excited by Ultrasonic Vivration
*Hiromi Isobe, Akira Kyusojin
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Keywords: Squeeze Gas Bearing, Micro Positioning, Motion Error Correction, Air Guide, Piezoelectric Actuator
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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