Proceedings of JSPE Semestrial Meeting
2003 JSPE Spring Meeting
Session ID : N61
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Host: The Japan Society of Precision Engineering

Development of an Ultra-Precise Positioning Stage Engaged with Gratings
*Ryohei Kanno, Satoshi Honda
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Keywords: Gratings, Precise Positioning, Inchworm Mechanism, Openloop Control, Laser Interference
CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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