2004 JSPE Autumn Meeting
Session ID : G07
Conference information
Host: The Japan Society of Precision Engineering
Nanoindentation of Single Crystal Silicon - (2nd Report) Observation of the phase transformation by HRTEM
[in Japanese], *[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese]
Author information
Keywords:
Nano machining,
Single crystal,
silicon,
phase transformation,
nanoindentation,
indentation
Details
