2004 JSPE Spring Meeting
Session ID : B62
Conference information
Host: The Japan Society of Precision Engineering
Ultrahigh precision ELID grinding of Solid Immersion Mirror Improvement of the surface-roughness and optical property
*Toru Suzuki, Hitoshi Ohomori, Yoshihiro Uehara, Weimin Lin, Akitake Makinouchi, Kiichi Ueyanagi, Kimihiro Wakabayashi, Tei-ichi Suzuki, Adachi Yukio
Author information
Keywords:
ELID grinding,
Solid immersion mirror,
paraboloidal mirror,
near-field optics,
on-machine measurement
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