Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : D25
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Host: The Japan Society of Precision Engineering

Development of an optical distance sensor fabricated by micromachining technology
*[in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese], [in Japanese]
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Keywords: Optical sensor, Distance measurement, Micromachining, LIGA process
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Abstract
[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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