Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : F26
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Host: The Japan Society of Precision Engineering

Polishing of CVD Diamond Film
*Tsuyoshi Yokosawa, Jun-ichiro Takagi, Seizi Kataoka, Nobuhiro Nihira, Norichika Hasegawa
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Keywords: Polishing, Ultrasonic, CVD diamond film
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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