Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H04
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Host: The Japan Society of Precision Engineering

Absolute shape measurements for silicon single crystal plane mirror using near-infrared interferometry
Junichi Utikosi, *Taichiro Okamoto, Amane Tsuda, Mizuho Morita
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[in Japanese]

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© 2004 The Japan Society for Precision Engineering
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