Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H07
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Host: The Japan Society of Precision Engineering

Multi Surface Interferometry Using a Wavelength Scanning Interferometer
*Ryohei Hanayama, Kenichi Hibino, Jan Burke, Bozenko F. Oreb, Shin'ichi Warisawa, Mamoru Mitsuishi
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Keywords: optical interferometer, wavelength scanning, phase measurement, inside interface
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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