Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H23
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Host: The Japan Society of Precision Engineering

Variation of microstructure in thin film controlled residual stress by substrate vibration method.
*Takamasa Suzuki, Akihito Matsumuro, Yutaka Takahashi
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Keywords: Thin solid film, Residual stress, Surface treatment, microstructure
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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