Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : H69
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Host: The Japan Society of Precision Engineering

Development of a vacuum sensor using SCREAM process for measuring pressures of sealed cavities
*Hironao Okada, Toshihiro Itoh, Tadatomo Suga
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Keywords: vacuum sensor, resonant sensor, sealing, damping, mems packaging, Single Crystal Reactive Etching And Metallization
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[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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