2004 JSPE Spring Meeting
Session ID : H77
Conference information
Host: The Japan Society of Precision Engineering
Development of Ultra Precision Dies for Hot Press Forming of Micro Optical Lens – Focused Ion Beam machining properties of GC and Ni-P Dies
*Hiroaki Ito, Kohshi Ito, Masahiro Arai, Koh-ichi Sugimoto, Toshiaki Matsukura, Toshikatsu Kogai
Author information
Keywords:
Focused Ion Beam machining,
Glass-like carbon,
Ni-P alloy film,
Micro Optical Lens,
Ultra Precision Dies
Details
