Proceedings of JSPE Semestrial Meeting
2004 JSPE Spring Meeting
Session ID : M38
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Host: The Japan Society of Precision Engineering

Development of hand-operated fine positioning stage with sub-nanometer resolution using displacement reduction mechanism
[in Japanese], *[in Japanese], [in Japanese], [in Japanese]
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Keywords: fine positioning stage, flexure hinge, positioning resolution, displacement reduction mechanism
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Abstract
[in Japanese]
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© 2004 The Japan Society for Precision Engineering
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