2004 JSPE Spring Meeting
Session ID : B31
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Host: The Japan Society of Precision Engineering
A Study on Mirror-like Grinding Mechanism for Gallium Arsenide(GaAs) 3th
*Yusuke Tashiro, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Masaki Hiyama
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