Research on Positioning Control of Ultra-precision Machine tool with Visual Feedback

Abstract

Micro-meso mechanical manufacturing (M4) technology has recently attracted attentions as an alternative micromachining solution because of its potentials of processing variety in materials into 3 dimensional forms. Using a micro lathe, which is installable and operational in a SEM (scanning electron microscope), we control the position of XY stage of the micro lathe with visual feedback from CCD camera. We investigate the movement mechanism of XY-stage, and the recognition accuracy of image processing.