Abstract
To evaluate the profile of ultra precision specimen, the multiprobe scanning method, such as 2-point method, 3-point method, could be applied. In this paper, the spatial frequency domain 2-point method is discussed. Firstly, the procedure for calculating one set 2-point method and combining two set 2-point method is introduced shortly. Then, the influence of systematic error is analyzed, and an error-free software calibration method is proposed. Although the systematic error is existent objectively and can not be eliminated completely, it is shown that the profile could be reconstructed perfectly without considering random error. The result of simulation confirms the theory analysis.
