Proceedings of JSPE Semestrial Meeting
2006 JSPE Autumn Meeting
Session ID : C67
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Host: The Japan Society for Precision Engineering

Surface profile measurement of micro structures using utraprecision on-machine laser probe system
*Shin-ya Morita, Yutaka Watanabe, Hitoshi Ohmori, Weimin Lin, Yoshihiro Uehara
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Keywords: ultraprecision machining, micro structure measurement
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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