ナノメトロロジカルAFMを用いた一次元グレーティングの校正(第 3 報) 自己相関係数を用いたピッチ算出法の検証

2006 JSPE Spring Meeting

Session ID : N44

Conference information

Host: The Japan Society for Precision Engineering

Calibration of 1–D Grating with Nanometrological AFM (3rd report)

Author information

*Osamu Sato
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
Kazuno Yoshizaki
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
Ichiko Misumi
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
Satoshi Gonda
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
Kentaro Sugawara
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)
Qiangxian Huang
Hefei University of Technology
Tomizo Kurosawa
Technology Information Department, National Institute of Advanced Industrial Science and Technology
Toshiyuki Takatsuji
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

CONFERENCE PROCEEDINGS FREE ACCESS

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