Abstract
This study describes the influence of substrate bias frequency in cBN coating with a magnetically enhanced plasma ion plating (MEP–IP) method on the cutting tool material and middle layers of coated films. It might be shown by SEM observation and element analysis that the tool material and the middle layers of coated films can be damaged in higher 13.56MHz frequency coating. The higher temperature is caused on the tool surface by skin effect. Therefore, we applied lower substrate bias frequency of 100kHz in coating in order to avoid low quality coating. As a result, the higher quality coated films can be obtained. Moreover, the better cutting performance was shown by 100kHz frequency coating.
