ELID grinding of CVD–SiC sphere mirror and examination of finishing process.

Abstract

In this study, The ELID grinding method and ultraprecision aspheric machine by using a non–contact on machine measurement probe were carried out. A high precision spherical CVD–SiC mirror was achieved. In order to decrease of surface roughness on grinding mark, the finishing method of the polish processing was examined. The good surface roughness and high accuracy of polish processing were obtained.