2006 JSPE Spring Meeting
Session ID : F36
Conference information
Host: The Japan Society for Precision Engineering
Plasma gas temperature estimation for atmospheric VHF plasma process
*Yasushi Oshikane, Hiroaki Kakiuchi, Kazuya Yamamura, Akihiko Nagao, Katsuyoshi Endo, Akinori Oda
Author information
Keywords:
atmospheric VHF plasma,
gas temperature,
rotational temperature,
hydrogen molecule,
Boltzmann plot,
band spectra
Details
