Removal of micro porous surface layer on the formation of meso porous silicon

Abstract

Removal of micro porous layer on the surface of meso or macro porous Si layer formed by anodization in HF acid was attempted. Meso or macro porous Si layer has worked as a catalyst support layer in our miniature fuel cells. However, 10–50nm thick micro porous region is formed on the surface of the meso or macro porous layer. The micro porous inhibits fluid flow and it might have caused difficulties in the catalyst deposition process. In this study, the removal of the micro porous layer was demonstrated by wet process using alkali solution and HF solution.