2006 JSPE Spring Meeting
Session ID : I04
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Host: The Japan Society for Precision Engineering
Evaluation of Thermal Stability of TiN/HfSiON Interfaces by X–ray Reflectivity Measurements
*Kouta Kawamura, Eiji Mishima, Takayoshi Shimura, Heiji Watanabe, kiyoshi Yasutake, Satoru Kamiyama, Yasusi Akasaka, Yasuo Nara, Kunio Nakamura, Keisaku Yamada
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