Proceedings of JSPE Semestrial Meeting
2006 JSPE Spring Meeting
Session ID : J14
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Host: The Japan Society for Precision Engineering

Development of a Membrane Driven Micro–Pump
*Masako Yamada, Yoshitake Akiyama, Keisuke Morishima, Yuji Furukawa
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Keywords: Micro–Pump, Micro–Bubble, Micro–heater
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[in Japanese]
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© 2006 The Japan Society for Precision Engineering
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