An Ultra Precision Production System Organized by Multiple Micro Robots

Abstract

The unique production system where many small robots with micro tools and sensorscan work, has developed in 1990 in order to realize suchprecise machining and measuring over the wider range. The small robot consists of piezo elements and electromagntes for providing the inch–worm locomotion. And many kinds of micro tools and sensors have been developed and implemented on these small robots. In this report, the review of these results and the future works will be presented.